Specifications
Drive type.......... Side
Travel range........ 13 mm
Sensitivity......... 1 µm
Angular deviation... < 200 µrad
Tracking accuracy... 2 µm
Reading accuracy.... 5 µm (half
division)
Load capacity
Horizontal....... 10 kg
Vertical......... 3 kg
Material............ Aluminium
Finish.............. Black
anodized
Weight.............. 0.13 kg
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