Height............. 20 mm
Step size.......... 0.5 µm
Parallelism........ ±1 µm
Accuracy........... ±10 µm
Reading accuracy
(by micrometer):... 2 µm
Custom Design
|
Slit width range... 0 - 2 mm
Height............. 20 mm Step size.......... 0.5 µm Parallelism........ ±1 µm Accuracy........... ±10 µm Reading accuracy (by micrometer):... 2 µm |
