11D-ALI-MET - Optical Beam Alignment Meter

Optical Beam Alignment Meter
Simultaneous measurements of beam position, angular displacements, power.
ActiveX package for integration in user application program
Two different PSDs (Position Sensing Detector) heads available
Multiple device operation available
Data streaming via RS232, direct data logging to Excel files

The system offers real time measurements of beam position and angular displacements as well as power display, with resolution down to 0. 1 µm. Works with CW beams, and offers portable, fast and accurate beam alignment solution. ActiveX software for integration in customer’s application program is available.

Main Applications
1. Examining errors in slideways
The Alignment Meter can measure tolerances and errors in mechanical devices with high precision. An Alignment Meter head is rigidly mounted perpendicular to a traveling carriage, and a laser is aligned towards the detector to define a straight optical path. As the carriage moves along the slideways the Alignment Meter measures changes in beam position and angle in two axes perpendicular to the direction of motion. Any changes in the position and angle readings will indicate deformities in the rails, play in the bearings, or both.

3. Alignment of articulated arms

4. Alignment of lasers and laser tubes

5. Alignment of laser systems for wafer inspection
2. Alignment monitoring
Using the Alignment Meter system it is possible to test the drift, centration, alignment of the beam relative to the outer housing or tube. The beam power fluctuations are also monitored. Using the Position and Angle screens simultaneously it is easy to track the beam, while the Chart functions record and save the characteristics over time.

Common Specifications
The head of Alignment Meter is composed of two PSD’s, beam splitter and lens assembly
PSD size 9mmx9mm (Standard) 4mmx4mm (Optional)
Type Dual-axis Si resin, no glass cover
Usable beam size range 50µm to Ø8mm 50µm to Ø3mm
Update rate Max 150Hz at 500Hz digital filter
Spectral range 350-1100nm
Position measurement range 8mm dia. max 3mm dia. max
Power range 10µW-10mW with filters Power accuracy (*)±5%
Lens type Plano convex achromat., AR coated
Beam splitter 50:50 AR coated, non-polarized
Temperature range 0°C - 35°C
Optional accessories ND filters, Hood
(*) To maintain full calibration accuracy, attenuating optical filter (ND) may be necessary for operation with beams greater than 1mW per PSD @ 633nm

There are two main models with variation in lens focal length:
Alignment Meter 50
Lens focal length 50mm
Position resolution Down to 0.1µm at 50Hz digital filter+Averaging
Position accuracy ±15µm edge-to-edge (±8µm)
Angle measurement range 180 mRad (90 mRad)
Angle resolution 0.02 mRad (0.01 mRad)
Angle accuracy 0.5 mRad edge-to-edge (0.01 mRad)
Weight 140 Gr. Excluding cables

Alignment Meter 100
Lens focal length 100mm
Position resolution Down to 0.1µm at 50Hz digital filter+Averaging
Position accuracy ±15µm edge-to-edge (±8µm)
Angle measurement range 80 mRad (40 mRad)
Angle resolution 0.01 mRad (0.006 mRad)
Angle accuracy 0.25 mRad edge-to-edge (0.15 mRad)
Weight 180 Gr. Excluding cables

Note: all values (in parentheses) refer to 4x4mm PSD version

Measurement capabilities

Real time display of X,Y beam centroid.
Main features: set relative center, perform zooming, alarm setting, average.

Real time measurements of beam angular deviations.
Main features: set relative center, perform zooming, alarm setting, average.

Display position or angle as large digits easily seen from a long work distance.

Display changes in the X,Y position, or in the X,Y angle versus time, with autoscaling and saving options.

Display power with analog and digital displays.
Main Features: change measuring units, load a filter file, perform ambient light suppression. Power is displayed for each PSD.
Power Plot

Display changes in Power versus time, for the Position sensor or for the Angle sensor, with autoscaling and saving options.

Minimum software and hardware requirements:
Pentium 4, 2.4GHz, 512MB RAM, 15MB HDD, 1 x CD ROM, VGA 8MB 1024X768 resolution, 16 bit, 1 x USB 2.0 port, Windows XP/7

Ordering Information
Model description
11D-ALI-MET-50 Measuring head with F = 50mm
11D-ALI-MET-100 Measuring head with F = 100mm
11D-1-ALI-MET-HOOD 55mm long hood
11D-1-ALI-MET-NG10 NG10 filter in housing
11D-1-ALI-MET-NG4 NG4 filter in housing
11D-1-ALI-MET-NG9 NG9 filter in housing

Optical Beam Alignment Meter