8NTS-XYZ-40-SPM - Plane-Parallel Nano Piezo Scanning Stage

Plane-Parallel Nano Piezo Scanning Stage
Double capacity sensor technology for feedback
Travel range up to: 40 µm
Ultra high resolution: 0.1 nm
Low cost
Compact design and low weight
Suitable for universal applications
High stiffness
Compensated creep effect of piezoceramics
Low frequency noise resistance
Ideal capable for microscopic application
Vacuum version available

Every year Standa Company supplies for laboratories and linear motion market thousands of unique translation and rotation positioners for wide spectrum of positioning applications. Nanometer and Sub-nanometer resolution is impossible to reach with high speed screw drives and linear motors, for this reason we have prepared product line based on piezo elements.

Series 8NTS are perfectly suitable for smooth sub nanometer translation of optical elements or probe in open and closed loop system.

Movable central part hangs on flexible springs and is driven with piezo actuators to ensure high stiffness and stability of application. 8NTS design provides excellent linearity and flatness of the movement, in contrast to the classical scanners based on piezoelectric tubes, where the scan surface is a sphere. In addition, plane-parallel scanners have higher mechanical strength, compared with fragile piezoelectric tubes.

Compact Piezo scanning stage 8NTS-XYZ-40-SPM multi-axes scanners are equipped with capacitive displacement sensors for digital closed-loop control It provides high accuracy and linearity of movement and eliminates the creep effect of piezoceramics. Capacitance measurements are made with TDC (time-to-digital conversion) technology where all measuring electronics is located as close as possible to the sensors. Such a design leads to the low noise and high speed displacement control.

To control 8NTS-XYZ-40-SPM piezo stages universal controllers 8NSC-3000 or 8NSC-1000 are used as well as NSpec software.

Applications range for 8NTS-XYZ-40-SPM includes: scanning probe microscopy (e.g. atomic force microscopy), nanopositioning, metrology, biology research, microelectronics, micromanipulation etc.

XY travel range, µm40 x 40
Z range, µm5
Resonant frequency XY, kHz5
Resonant frequency Z, kHz50
Resolution (closed loop), nm1
Resolution (open loop), nm0.1
Angle tilting over the full range, nm<0.01°
Maximum scanning speed, Hz (line/sec)50
Base sample weight, g50
Dimensions, mm70 x 62 x 32.2
Ordering Information

Plane-Parallel Nano Piezo Scanning Stage