| Specifications |
 |
| Travel range
|
|
|
|
| X / Y, mm | | ±55
|
|
|
|
| Z, mm | | ±25
|
|
|
|
| Ox / Oy, deg | | ±14
|
|
|
|
| Oz, deg | | ±30
|
|
|
|
| Maximum Speed
|
|
|
|
| X / Y, mm/s | | 12
|
|
|
|
| Z, mm/s | | 5
|
|
|
|
| Ox / Oy, deg/s | | 6
|
|
|
|
| Oz, deg/s | | 3
|
|
|
|
| Bi-directional Repeatability
|
|
|
|
| X / Y, µm | | 0.51
|
|
|
|
| Z, µm | | 0.06
|
|
|
|
| Ox / Oy, µrad | | 1
|
|
|
|
| Oz, µrad | | 1
|
|
|
|
| Absolute Accuracy
|
|
|
|
| X / Y, µm | | ±7
|
|
|
|
| Z, µm | | ±5
|
|
|
|
| Ox / Oy, mrad | | 300
|
|
|
|
| Oz, mrad | | 300
|
|
|
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| Load Capacity
|
|
|
|
| Horizontal, kg | | 30
|
|
|
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| Vertical, kg | | 15
|
|
|
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| Inversed, kg | | 15 |
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Product added to the Wishlist
| Ordering Information |
|
| Model |
|
Description |
|
|
|
|
|
|
|
|
| 8HEX280 |
|
6DOF Platform |
|
|
|
|
|
|
|
| 8UMC-02-6 |
|
6DOF Platform Controller |
|
|
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|
