Simultaneous measurements of beam position, angular displacements, power.
ActiveX package for integration in user application program
Two different PSDs (Position Sensing Detector) heads available
Multiple device operation available
Data streaming via RS232, direct data logging to Excel files
The system offers real time measurements of beam position and angular displacements as well as power display, with resolution down to 0. 1 µm. Works with CW beams, and offers portable, fast and accurate beam alignment solution. ActiveX software for integration in customer’s application program is available.
Main Applications
1. Examining errors in slideways The Alignment Meter can measure tolerances and errors in mechanical devices with high precision. An Alignment Meter head is rigidly mounted perpendicular to a traveling carriage, and a laser is aligned towards the detector to define a straight optical path. As the carriage moves along the slideways the Alignment Meter measures changes in beam position and angle in two axes perpendicular to the direction of motion. Any changes in the position and angle readings will indicate deformities in the rails, play in the bearings, or both.
3. Alignment of articulated arms
4. Alignment of lasers and laser tubes
5. Alignment of laser systems for wafer inspection
2. Alignment monitoring Using the Alignment Meter system it is possible to test the drift, centration, alignment of the beam relative to the outer housing or tube. The beam power fluctuations are also monitored. Using the Position and Angle screens simultaneously it is easy to track the beam, while the Chart functions record and save the characteristics over time.
Common Specifications The head of Alignment Meter is composed of two PSD’s, beam splitter and lens assembly
PSD size
9mmx9mm (Standard)
4mmx4mm (Optional)
Type
Dual-axis Si resin, no glass cover
Usable beam size range
50µm to Ø8mm
50µm to Ø3mm
Update rate
Max 150Hz at 500Hz digital filter
Spectral range
350-1100nm
Position measurement range
8mm dia. max
3mm dia. max
Power range
10µW-10mW with filters Power accuracy (*)±5%
Lens type
Plano convex achromat., AR coated
Beam splitter
50:50 AR coated, non-polarized
Temperature range
0°C - 35°C
Optional accessories
ND filters, Hood
(*) To maintain full calibration accuracy, attenuating optical filter (ND) may be necessary for operation with beams greater than 1mW per PSD @ 633nm
There are two main models with variation in lens focal length:
Alignment Meter 50
specifications
Lens focal length
50mm
Position resolution
Down to 0.1µm at 50Hz digital filter+Averaging
Position accuracy
±15µm edge-to-edge (±8µm)
Angle measurement range
180 mRad (90 mRad)
Angle resolution
0.02 mRad (0.01 mRad)
Angle accuracy
0.5 mRad edge-to-edge (0.01 mRad)
Weight
140 Gr. Excluding cables
Alignment Meter 100
specifications
Lens focal length
100mm
Position resolution
Down to 0.1µm at 50Hz digital filter+Averaging
Position accuracy
±15µm edge-to-edge (±8µm)
Angle measurement range
80 mRad (40 mRad)
Angle resolution
0.01 mRad (0.006 mRad)
Angle accuracy
0.25 mRad edge-to-edge (0.15 mRad)
Weight
180 Gr. Excluding cables
Note: all values (in parentheses) refer to 4x4mm PSD version
Measurement capabilities
Position
Real time display of X,Y beam centroid. Main features: set relative center, perform zooming, alarm setting, average.
Angle
Real time measurements of beam angular deviations. Main features: set relative center, perform zooming, alarm setting, average.
Digital
Display position or angle as large digits easily seen from a long work distance.
Chart
Display changes in the X,Y position, or in the X,Y angle versus time, with autoscaling and saving options.
Power
Display power with analog and digital displays. Main Features: change measuring units, load a filter file, perform ambient light suppression. Power is displayed for each PSD.
Power Plot
Display changes in Power versus time, for the Position sensor or for the Angle sensor, with autoscaling and saving options.
Minimum software and hardware requirements: Pentium 4, 2.4GHz, 512MB RAM, 15MB HDD, 1 x CD ROM, VGA 8MB 1024X768 resolution, 16 bit, 1 x USB 2.0 port, Windows XP/7
