8MTL20XY - XY Precision Compact Planar Tables New!

XY Precision Compact Planar Tables
 
Ultra precision 2-axis motorized linear positioner
Direct drive zero backlash system
Travel range: 20x20mm (planar)
Resolution: <1 nm
Accuracy: < ±0.15 µm (calibrated to load)
Bidirectional repeatability (RMS): ±0.075 µm
Maximum velocity: >500 mm/s
Maximum Acceleration: >45000 mm/s2
Up to 15 kg load capacity
Low-profile, compact footprint, high compatibility
Long life performance guaranteed
 
 
Specifications
Kinematics & Feedback information
Active AxesX,Y
Travel range20 x 20 mm
Encoder TypeOptical
Encoder ModelLen1
Encoder Resolution25 nm
(integrated interpolator)
<1nm
(interpolated by driver)
Encoder InterfaceDifferential RS422
or Analog Sin/Cos
Internal MultiplierYES
1) Multiplication factorup to x200
(if integrated interpolator)
up to x65536
(if interpolated by driver)
Encoder Grating Period20 µm
Reference Mark (Index)YES (In center of travel)
2) Absolute Accuracy
  before calibration±2.50 µm
  after calibration±0.15 µm
Uni-Directional Repeatability±0.025 µm
2) Bi-Directional Repeatability
(peak to peak)
±0.1 µm
2) Bi-Directional Repeatability (RMS)±0.075 µm
3) Pitch, µrad / arcsec±25 / ±5
3) Yaw, µrad / arcsec±13 / ±3
Roll, µrad / arcsec±25.00/ ±5.00
4) Maximum Velocity (load 4kg)>500 mm/s
5) Maximum Acceleration (load 4kg)>45000 mm/s2
Limits Switches Type (Safety)Optical (Optrons)
Limit Switch Polarity (Safety)Pushed is closed
Limit Switch Voltage5…24 V
Load, Guiding & Transmission Information
Design TypeLinear Motor Stage;
Planar Design
Linear Motor ModelLM9
Linear Motor Design TypeIronless BLDC motor
Maximum Bus Voltage>80 VDC
6) Load Capacity (Centrally Placed)15 kg
7) Moving Mass X1.10 kg
7) Moving Mass Y0.45 kg
Guiding SystemLinear rails with carriages
Material And Environment Conditions
Housing MaterialAluminum Alloy
Housing Coating (Finish)Black Anodizing
Environment pressureNormal Atmosphere
Operating Temperature20±2, °C
Control, Communication & Cabling
8) Recommended controllersACS Products Line
or
8SMC5-USB series
8) Recommended driversACS Product Line
or
8SMC5-USB series
9) Recommended power supply1phase / 3 phase
source
12) Recommended communication interfaceEtherCAT / RS232 /
USB / TCP-IP
Cable Length2 m
(other by request)
10) Differential OutputsOptionally available
by request
Additional Details
Dimensions of Moving Platform133 x 142 mm
(W x L)
Stage Dimensions180 x 170 x 51 mm
(W x L x H)
Measurement SystemMetric/Imperial
11) Orthogonality, µrad / arcsec24 / 5
13)Protection LevelBasic
RoHSCompliant
Weight1.8 kg
Ordering Information
Model Description
8MTL20XY XY Planar Linear Stage
with aperture
8MTL20XY-S XY Planar Linear Stage












1) With x4 evaluation; system can be delivered with standard analog SIN/COS encoder interface for personal interpolation.

2) Absolute Accuracy & Bi-Directional Repeatability measurements are processed with Zygo ZMI 501 Michelson laser interferometer.

3) Pitch & Yaw measurements are processed with 11D-ALI-COL electronic autocollimator. Resolution of 11D-ALI-COL: 1 µrad. Environment error: 1 µrad.

4) Maximum Velocity is electrically limited by encoder and driver CUT-OF frequency; maximum velocity is also limited by guiding system.

5) Maximum Acceleration is limited by Drivers` Peak Current, Motors` Peak Current and External Load (inertia). Please contact Standa for support.

6) Load Capacity is limited by position of load and integrated guiding system. Please contact Standa support for loading calculation.

7) Moving Mass is constant parameter of system which characterize m0 or inertia of unloaded system.

8) Recommended controllers & Recommended drivers can be optimized for a certain application. Please contact Standa support for recommendation.

9) Recommended power supply depends on required duty cycle and load. Please contact Standa support for recommendation.

10) Differential Outputs are available in passive (buffered) or active (modulated) way with LCMv2.

11) Stages can be assembled with better orthogonality by request.

12) Scalar Control can be implemented with USB/ TCP-IP / RS-232 communication iterface; for vector control we recommend to use EtherCAT.

13) Protection of guiding system is limited and not supposed to be used in wet and dusty environment.
 

© 2020 STANDA LTD. All rights reserved.
P.O. BOX 377 , 03012 Vilnius, Lithuania; phone: +370 5 2651474; fax: +370 5 2651483; e-mail: sales@standa.LT
XY Precision Compact Planar Tables