±0.5 µm or better bi-directional repeatability RMS
±1.5 µm or better calibrated absolute accuracy
1000 m/s velocity, 15 000 mm/s2 acceleration
Flexible modular design could be customized for any ultra-precise application requirements
System size and travel range customization available
Are you ready to switch your micro machining setup to the next level?
Standa automated precision gantry assemblies are now available as the cost efficient off the shelf product.
- Backlash free operation ensures high precision of motion ±0.5 µm or better bi-directional repeatability RMS in all directions;
- Calibrated high accuracy down to: ±1.5 µm or better trough whole available travel range;
- Ultra-precise parts guarantee extremely low angular deviation down to ±20 µrad and ±25 µrad or better orthogonality;
- High velocity of more than 1000 mm/s and high acceleration 15 000 mm/s2 results in high throughput and productivity;
- Direct driver vertical axis with adjustable pneumatic weight compensation suites for uncertain tool weight and guarantees versatility;
- Ironless motors integrated in all XYZ modules ensure high dynamic range and dynamic stability;
- Incremental feedback system placed directly on the load enables backlash free servo control and immediate dynamic response;
- Absolute encoder options are available to prevent system from homing operation;
- Advanced real gantry control algorithms ensure stability and low dynamic error;
- Flexible modular design can meet wide range of ultra-precise application requirements;
- Perfectly suitable for semiconductor fabrication or metrology, holes drilling, laser ablation and other application;
- Low complexity of mechanism enables rapid scaling of similar system in different travel ranges;
Release your ideas by choosing Standa mechatronics.
Specifications
Model
8-0240
Kinematics & Feedback information
Active Axes
X
Y
Z
Travel Range (X,Y,Z), mm
1000
1300
100
Encoder Type
Optical
Encoder Model
LEN1
Encoder Resolution, nm
down to 0.3
Encoder Interface
1Vpp or Differential RS422
Internal Multiplier
YES
Multiplication factor 1)
up to x65536
Encoder Grating Period, µm
20
Reference Mark (Index)
Yes
Absolute Accuracy (After Calibration), µm
±1.5
±1.5
±0.5
Bi-Directional Repeatability (RMS) 2), µm
±0.5
±0.5
±0.1
Pitch 3), µrad / arcsec
±15 / ±3.1
±42 / ±8.66
±55 / ±11.34
Yaw 3), µrad / arcsec
±7.5 / ±1.55
±42 / ±8.66
±55 / ±11.34
Roll, µrad / arcsec
±7.5 / ±1.55
±42 / ±8.66
±55 / ±11.34
Maximum Velocity (no load, 4 motors) 4), mm/s
1000
Maximum Acceleration (no load, 4 motors) 5), mm/s2
10000
Limits Switches Type (Safety)
Hall Sensors
Limit Switch Polarity (Safety)
"Positive end of run"
Limit Switch Voltage, V
5…24
Load, Guiding & Transmission Information
Design Type
Real Gantry
Traverse Axis
Vertical Linear Motor Axis
Linear Motor Model
LM12
LM13
LM3
Linear Motor Design Type
Ironless BLDC motor
Maximum Bus Voltage, VDC
325
Quantity of Motors
2
1
1
Load Capacity (Centrally Placed) 6)
30
Moving Mass 7), kg
265
35
2.20
Guiding System
Recirculating linear rails and carriages units with caged balls
Recirculating linear rails and carriages units
Material & Environment Conditions
Housing Material
Granite
Housing Coating (Finish)
N/A
Environment Pressure
Normal Atmosphere
Operating Temperature, °C
20±2
Control, Communication and Cabling
Recommended Controllers 8)
CMXA
Recommended Drivers 8)
CMXA / DUMXA
Recommended Power Supply 9)
1 phase 220VAC ~ 50Hz supply
Recommended Communication Interface 12)
EtherCAT / RS232 / USB / TCP-IP
Cable Length, m
Up to
Differential Outputs 10)
Can be requested separately
Accessories Information
Base Plate for Mechanical Interface
1TS08-12-05-AP-1000 (custom)
Cable Management
Included for 3 axes. May be developed according to application requirements
Additional Details
Overall Linear Stage Dimensions (W x L x H), mm
2300 x 1690 x 912
Dimensions of Moving Platform (W x L), mm
295 x130
Measurement System
Metric / Imperial
Orthogonality11), µrad / arcsec
48.48 /10
Aperture (W x L), mm
Can be requested separately
Weight, kg
TBD *
Specifications Notes
* - TBD - to be determined.
1) With x4 evaluation; system can be delivered with standard analog SIN/COS encoder interface for personal interpolation.
2) Absolute Accuracy & Bi-Directional Repeatability measurements are processed with Zygo ZMI 501 Michelson laser interferometer.
3) Pitch & Yaw measurements are processed with 11D-ALI-COL electronic autocollimator. Resolution of 11D-ALI-COL: 1 µrad. Environment error: 1 µrad.
4) Maximum Velocity is electrically limited by encoder and driver CUT-OF frequency; maximum velocity is also limited by guiding system.
5) Maximum Acceleration is limited by Drivers` Peak Current, Motors` Peak Current and External Load (inertia). Please contact Standa for explanation.
6) Load Capacity is limited by position of load and integrated guiding system. Please contact Standa support for loading calculation.
7) Moving Mass is constant parameter of system which characterize m0 or inertia of unloaded system. In real gantry system, final moving mass will depend on quantity of motors.
8) Recommended controllers & Recommended drivers can be optimized for a certain application. Please contact Standa support for recommendation.
9) Recommended power supply depends on required duty cycle and load. Please contact Standa support for recommendation.
10) Differential Outputs are available in passive (buffered) or active (modulated) way with LCMv2.
11) Stages can be optionally assembled with enhanced orthogonality (if required).
12) Scalar Control can be implemented with USB / TCP-IP / RS-232 communication iterface; for vector control we recommend to use EtherCAT.
Product added to the Wishlist
Ordering Information
Model
Description
8-0240
High-Precision 3-Axis Granite Gantry Positioning System
Please, indicate your specific requirements in comments field, while inquiring this product.
