Granite Gantry Ultra-Precision XYZ Positioning System
Granite Gantry Ultra-Precision XYZ Positioning System
Granite Gantry Ultra-Precision XYZ Positioning System
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STANDA in Lithuania
STANDA P.BOX 2684 , 03001 Vilnius 9 P.O., Lithuania
Phone +370 5 2651474, Fax +370 5 2651483
E-mail: sales@standa.LT
Standa in the World
8-0240 - Granite Gantry Ultra-Precision XYZ Positioning System New!
Granite Gantry Ultra-Precision XYZ Positioning System
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Positioning range: XY - 1000x1300 mm, Y - 90 mm

±0.5 µm or better bi-directional repeatability RMS

±1.5 µm or better calibrated absolute accuracy

1000 m/s velocity, 15 000 mm/s2 acceleration

Flexible modular design could be customized
for any ultra-precise application requirements

System size and travel range customization available

Are you ready to switch your micro machining setup to the next level?

Standa automated precision gantry assemblies are now available as the cost efficient off the shelf product.

- Backlash free operation ensures high precision of motion ±0.5 µm or better bi-directional repeatability RMS in all directions;
- Calibrated high accuracy down to: ±1.5 µm or better trough whole available travel range;
- Ultra-precise parts guarantee extremely low angular deviation down to ±20 µrad and ±25 µrad or better orthogonality;
- High velocity of more than 1000 mm/s and high acceleration 15 000 mm/s2 results in high throughput and productivity;
- Direct driver vertical axis with adjustable pneumatic weight compensation suites for uncertain tool weight and guarantees versatility;
- Ironless motors integrated in all XYZ modules ensure high dynamic range and dynamic stability;
- Incremental feedback system placed directly on the load enables backlash free servo control and immediate dynamic response;
- Absolute encoder options are available to prevent system from homing operation;
- Advanced real gantry control algorithms ensure stability and low dynamic error;
- Flexible modular design can meet wide range of ultra-precise application requirements;
- Perfectly suitable for semiconductor fabrication or metrology, holes drilling, laser ablation and other application;
- Low complexity of mechanism enables rapid scaling of similar system in different travel ranges;

Release your ideas by choosing Standa mechatronics.


Model 8-0240
Kinematics & Feedback information
 Active Axes X Y Z
 Travel Range (X,Y,Z), mm 1000 1300 100
 Encoder Type Optical
 Encoder Model LEN1
 Encoder Resolution, nm down to 0.3
 Encoder Interface 1Vpp or Differential RS422
 Internal Multiplier YES
 Multiplication factor 1) up to x65536
 Encoder Grating Period, µm 20
 Reference Mark (Index) Yes
 Absolute Accuracy (After Calibration), µm ±1.5 ±1.5 ±0.5
 Bi-Directional Repeatability (RMS) 2), µm ±0.5 ±0.5 ±0.1
 Pitch 3), µrad / arcsec ±15 / ±3.1 ±42 / ±8.66 ±55 / ±11.34
 Yaw 3), µrad / arcsec ±7.5 / ±1.55 ±42 / ±8.66 ±55 / ±11.34
 Roll, µrad / arcsec ±7.5 / ±1.55 ±42 / ±8.66 ±55 / ±11.34
 Maximum Velocity (no load, 4 motors) 4), mm/s 1000
 Maximum Acceleration (no load, 4 motors) 5), mm/s2 10000
 Limits Switches Type (Safety) Hall Sensors
 Limit Switch Polarity (Safety) "Positive end of run"
 Limit Switch Voltage, V 5…24
Load, Guiding & Transmission Information
 Design Type Real Gantry Traverse Axis Vertical Linear Motor Axis
 Linear Motor Model LM12 LM13 LM3
 Linear Motor Design Type Ironless BLDC motor
 Maximum Bus Voltage, VDC 325
 Quantity of Motors 2 1 1
 Load Capacity (Centrally Placed) 6) 30
 Moving Mass 7), kg 265 35 2.20
 Guiding System Recirculating linear rails and carriages units with caged balls Recirculating linear rails and carriages units
Material & Environment Conditions
 Housing Material Granite
 Housing Coating (Finish) N/A
 Environment Pressure Normal Atmosphere
 Operating Temperature, °C 20±2
Control, Communication and Cabling
 Recommended Controllers 8) CMXA
 Recommended Drivers 8) CMXA / DUMXA
 Recommended Power Supply 9) 1 phase 220VAC ~ 50Hz supply
 Recommended Communication Interface 12) EtherCAT / RS232 / USB / TCP-IP
 Cable Length, m Up to
 Differential Outputs 10) Can be requested separately
Accessories Information
 Base Plate for Mechanical Interface 1TS08-12-05-AP-1000 (custom)
 Cable Management Included for 3 axes. May be developed according to application requirements
Additional Details
 Overall Linear Stage Dimensions (W x L x H), mm 2300 x 1690 x 912
 Dimensions of Moving Platform (W x L), mm 295 x130
 Measurement System Metric / Imperial
 Orthogonality11), µrad / arcsec 48.48 /10
Aperture (W x L), mm Can be requested separately
 Weight, kg TBD * 

Specifications Notes

* - TBD - to be determined.

1) With x4 evaluation; system can be delivered with standard analog SIN/COS encoder interface for personal interpolation.

2) Absolute Accuracy & Bi-Directional Repeatability measurements are processed with Zygo ZMI 501 Michelson laser interferometer.

3) Pitch & Yaw measurements are processed with 11D-ALI-COL electronic autocollimator. Resolution of 11D-ALI-COL: 1 µrad. Environment error: 1 µrad.

4) Maximum Velocity is electrically limited by encoder and driver CUT-OF frequency; maximum velocity is also limited by guiding system.

5) Maximum Acceleration is limited by Drivers` Peak Current, Motors` Peak Current and External Load (inertia). Please contact Standa for explanation.

6) Load Capacity is limited by position of load and integrated guiding system. Please contact Standa support for loading calculation.

7) Moving Mass is constant parameter of system which characterize m0 or inertia of unloaded system. In real gantry system, final moving mass will depend on quantity of motors.

8) Recommended controllers & Recommended drivers can be optimized for a certain application. Please contact Standa support for recommendation.

9) Recommended power supply depends on required duty cycle and load. Please contact Standa support for recommendation.

10) Differential Outputs are available in passive (buffered) or active (modulated) way with LCMv2.

11) Stages can be optionally assembled with enhanced orthogonality (if required).

12) Scalar Control can be implemented with USB / TCP-IP / RS-232 communication iterface; for vector control we recommend to use EtherCAT.

Ordering Information
Model Description  
8-0240 High-Precision 3-Axis Granite Gantry Positioning System
Please, indicate your specific requirements in comments field, while inquiring this product.

Standa is able to produce any custom opto-mechanical device. Contact us with your needs.

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