|
Ball screw linear translation stage of series 8MTF200XY is based on pair of stepper (optionally with rotary encoders) or 3 phase BLDC servo motor technology. High precision ball screw & servo motor combination allow user to apply high precision and self-locking system through extremely cost effective way.
Optionally available non-contact optical encoder as a feedback system integrated directly on the moving load, guarantees sub-nanometer resolution of positioning with high precision.
Naturally aged aluminum alloy guaranties high temperature stability, softness of 8MTF200XY instruments and excellent long period kinematics without drift of guide system. Miniature ultra-high precision linear recirculating guiding system guarantees minimal friction and excellent motion stability.
Positioning table of series 8MTF200XY can be optionally prepared for clean rooms and vacuum up to 10-3 Torr .For higher vacuum please contact Standa support. Additional requirement of cleanliness or sealing of the stage can be supported on demand.
Motorized translation stage can be easily connected to standard imperial/metric optical table directly. XY scanning stage is directly assembled to PLANAR three-piece like design, without using any connecting plates. Extremely high straightness, flatness and orthogonality is available by default.
Motion control of 8MTF series translation stages is available with Standa or ACS motion Controllers & Drivers in exposed or housed configurations.
For industry applications 8MTF200XY linear positioning stages can be supplied mounted on aluminum breadboard 1B-Al, honeycomb breadboard 1HB, standard optical table 1HT or extremely flat granite plate 1GB fully sealed from spray and dust to ensure long and reliable performance of kinematic pairs.
Moreover, Motorized XY table hase extremely low profile and compact design allow 8MTF-200XY to be incorporated into many different types of scanning systems and easily mounted to most common microscope platforms. Standa supports μ-manager host application.
Covered applications: #microscopy, #imaging, #micromachining, #laser cutting, #scribing, #wafer inspection, #PCB inspection , #PCB drilling, #PCB assembly, #robotics, #biotechnology, #metrology, #laser marking.
Specifications
| Model |
8MT200XY-4247 |
8MT200XY-4247-MEN1 |
8MT200XY-B43-MEN4 |
8MT200XY-B43-MEN4-
LEN1-025 |
| Kinematics & Feedback information |
| Travel Range (X x Y), mm |
200 x 200 |
| Min. Incremental Motion, μm |
0.625 |
0.1 |
| Rotary Encoder Type |
- |
Optical |
| Rotary Encoder Model |
- |
MEN1 |
MEN4 |
| Rotary Encoder Resolution, μm |
- |
0.5 |
0.1 |
| Rotary Encoder Interface |
- |
TTL |
Differential RS422 |
| Rotary Encoder Internal Multiplier |
- |
NO |
| Rotary Encoder Multiplication factor 1) |
- |
| Rotary Encoder Grating Period, deg |
- |
0.09 |
0.018 |
| Rotary Encoder Reference Mark (Index) |
- |
Yes |
Linear Encoder Type |
- |
Optical |
| Linear Encoder Model |
- |
LEn1 |
| Linear Encoder Resolution, nm |
- |
25 |
| Linear Encoder Interface |
- |
Differential
RS4221) |
| Linear Encoder Internal Multiplier |
- |
YES |
| Linear Encoder Multiplication factor 1) |
- |
x200 |
| Linear Encoder Grating Period, µm |
- |
20 |
| Linear Encoder Reference Mark (Index) |
- |
YES (center) |
| Absolute Accuracy 2) |
| Before Calibration, µm/mm |
±8/100 |
| After Calibration, µm |
request |
±3 |
±2 |
±1.5 |
| Uni-Directional Repeatability, µm |
±0.50 |
| Bi-Directional Repeatability (peak to peak) 2), µm |
±2 |
±1 |
±0.5 |
| Bi-Directional Repeatability (RMS) 2), µm |
±1.5 |
±1 |
±0.45 |
| Pitch 3), µrad / arcsec |
±100.00 / ±20.63 |
| Yaw 3), µrad / arcsec |
±30.00 / ±6.19 |
| Roll, µrad / arcsec |
±30.00 / ±6.19 |
| Maximum Velocity (with load 4kg) 4), mm/s |
30 |
50 |
| Maximum Acceleration (with load 4kg) 5), mm/s2 |
150 |
250 |
| Limits Switches Type (Safety) |
Digital Hall Sensors |
| Limit Switch Polarity (Safety) |
Pushed is open |
| Limit Switch Voltage, VDC |
5...24 |
| Load, Guiding & Transmission Information |
| Design Type |
Motorized Ball Screw XY Planar Stage |
| Ball Screw Pitch, mm |
2 |
| Motor Model |
4247 |
B43 |
| Motor Design Type |
Bipolar Stepper Motor |
3 Phase BLDC motor |
| Maximum Bus Voltage, VDC |
48 |
| Load Capacity (Centrally Placed) 6) |
| Horizontal, kg |
8 |
| Vertical, kg |
N/A |
| Moving Mass 7), kg |
9.5 |
| Guiding System |
Ultra-precise recirculating linear rails and carriages units |
| Material & Environment Conditions |
| Housing Material |
Aluminum Alloy |
| Housing Coating (Finish) |
Black Anodizing |
| Environment Pressure |
Normal Atmosphere |
| Operating Temperature, °C |
20±2 |
| Control, Communication and Cabling |
| Recommended Controllers 8) |
ACS Products Line or 8SMC5-USB series |
| Recommended Drivers 8) |
ACS Products Line or 8SMC5-USB series |
| Recommended Power Supply 9) |
PS36-4.4-4 |
| Recommended Communication Interface 12) |
EtherCAT / RS232 / USB / TCP-IP |
| Cable Length, m |
2 (other by request) |
| Differential Outputs 10) |
N/A |
On request |
| Accessories Information |
| Base Plate for Mechanical Interface |
Not required |
| Z Configuration |
Not available
(choose from other Standa stages series) |
| Additional Details |
| Dimensions of Moving Platform (W x L), mm |
335 x 380 |
| Overall Linear Stage Dimensions (W x L x H), mm |
402 x 450 x 76 |
| Measurement System |
Metric / Imperial |
| Orthogonality 11), µrad / arcsec |
73 / 15 |
| Protection Level13) |
Optionally can be supplied with special cover (with air purge & dust protection) |
| RoHS |
Compliant |
| Weight, kg |
request |
request |
1) With x4 evaluation; system can be delivered with standard analog SIN/COS encoder interface for personal interpolation.
2) Absolute Accuracy & Bi-Directional Repeatability measurements are processed with Zygo ZMI 501 Michelson laser interferometer.
3) Pitch & Yaw measurements are processed with 11D-ALI-COL electronic autocollimator. Resolution of 11D-ALI-COL: 1 µrad. Environment error: 1 µrad.
4) Maximum Velocity is electrically limited by encoder and driver CUT-OF frequency; maximum velocity is also limited by guiding system.
5) Maximum Acceleration is limited by Drivers` Peak Current, Motors` Peak Current and External Load (inertia). Please contact Standa for support.
6) Load Capacity is limited by position of load and integrated guiding system. Please contact Standa support for loading calculation.
7) Moving Mass is constant parameter of system which characterize m0 or inertia of unloaded system.
8) Recommended controllers & Recommended drivers can be optimized for a certain application. Please contact Standa support for recommendation.
9) Recommended power supply depends on required duty cycle and load. Please contact Standa support for recommendation.
10) Differential Outputs are available in passive (buffered) or active (modulated) way with LCMv2.
11) Stages can be assembled with better orthogonality by request.
12) Scalar Control can be implemented with USB / TCP-IP / RS-232 communication iterface; for vector control we recommend to use EtherCAT.
13) Protection of guiding system is limited and not supposed to be used in wet and dusty enviroment.
|
|
